JPS5871541A - イオンマイクロアナライザ - Google Patents

イオンマイクロアナライザ

Info

Publication number
JPS5871541A
JPS5871541A JP56170585A JP17058581A JPS5871541A JP S5871541 A JPS5871541 A JP S5871541A JP 56170585 A JP56170585 A JP 56170585A JP 17058581 A JP17058581 A JP 17058581A JP S5871541 A JPS5871541 A JP S5871541A
Authority
JP
Japan
Prior art keywords
secondary ions
depth
ion
saturation value
ions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56170585A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6341185B2 (en]
Inventor
Eiichi Izumi
泉　栄一
Hifumi Tamura
田村　一二三
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP56170585A priority Critical patent/JPS5871541A/ja
Priority to US06/435,728 priority patent/US4510387A/en
Publication of JPS5871541A publication Critical patent/JPS5871541A/ja
Publication of JPS6341185B2 publication Critical patent/JPS6341185B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP56170585A 1981-10-23 1981-10-23 イオンマイクロアナライザ Granted JPS5871541A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP56170585A JPS5871541A (ja) 1981-10-23 1981-10-23 イオンマイクロアナライザ
US06/435,728 US4510387A (en) 1981-10-23 1982-10-20 Ion micro-analysis

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56170585A JPS5871541A (ja) 1981-10-23 1981-10-23 イオンマイクロアナライザ

Publications (2)

Publication Number Publication Date
JPS5871541A true JPS5871541A (ja) 1983-04-28
JPS6341185B2 JPS6341185B2 (en]) 1988-08-16

Family

ID=15907558

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56170585A Granted JPS5871541A (ja) 1981-10-23 1981-10-23 イオンマイクロアナライザ

Country Status (2)

Country Link
US (1) US4510387A (en])
JP (1) JPS5871541A (en])

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0122563B1 (de) * 1983-04-14 1988-03-30 Siemens Aktiengesellschaft Verfahren zur Abbildung von elektrischen Sperrschichten (pn-Übergängen) in Halbleitern durch Verarbeitung von korpuskularstrahlinduzierten Signalen im Raster-Korpuskularmikroskop
US4661702A (en) * 1984-10-24 1987-04-28 The Perkin-Elmer Corporation Primary ion beam raster gating technique for secondary ion mass spectrometer system
JPH0673296B2 (ja) * 1989-07-20 1994-09-14 株式会社日立製作所 二次イオン質量分析装置
JP2774878B2 (ja) * 1991-04-25 1998-07-09 株式会社日立製作所 多層膜絶縁物試料の二次イオン質量分析方法
US5442174A (en) * 1992-10-23 1995-08-15 Fujitsu Limited Measurement of trace element concentration distribution, and evaluation of carriers, in semiconductors, and preparation of standard samples
JP3396980B2 (ja) * 1994-12-22 2003-04-14 ソニー株式会社 濃度分布の解析方法
WO1999015884A1 (en) * 1997-09-22 1999-04-01 Oryx Instruments & Materials Corporation Monolayer analysis using dynamic secondary ion mass spectrometry
JP4410154B2 (ja) * 2005-06-09 2010-02-03 株式会社東芝 デコンボリューション解析装置、デコンボリューション解析プログラム及びデコンボリューション解析方法
US9091133B2 (en) * 2009-02-20 2015-07-28 Halliburton Energy Services, Inc. Swellable material activation and monitoring in a subterranean well

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5560844A (en) * 1978-10-31 1980-05-08 Sumitomo Metal Ind Ltd Surface analysis method

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3894233A (en) * 1972-10-27 1975-07-08 Hitachi Ltd Ion microprobe analyzer
JPS532599B2 (en]) * 1972-10-30 1978-01-30

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5560844A (en) * 1978-10-31 1980-05-08 Sumitomo Metal Ind Ltd Surface analysis method

Also Published As

Publication number Publication date
JPS6341185B2 (en]) 1988-08-16
US4510387A (en) 1985-04-09

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